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Tsu-Jae King Liu

Dean, College of Engineering

Tsu-Jae King Liu headshot

Tsu-Jae King Liu is Dean and Roy W. Carlson Professor of Engineering at UC Berkeley, where she has been a professor in the EECS department since 1996. She is best known for the development of polycrystalline silicon-germanium thin film technology for applications in integrated circuits and microsystems, and for co-developing the three-dimensional “FinFET” transistor design that is used in all leading-edge microprocessor chips today.

She earned her B.S., M.S. and Ph.D. degrees in Electrical Engineering from Stanford University. Before joining the UC Berkeley faculty she worked at the Xerox Palo Alto Research Center as a Member of Research Staff. Her awards include the DARPA Significant Technical Achievement Award (2000) for development of the FinFET, the IEEE Kiyo Tomiyasu Award (2010) for contributions to nanoscale MOS transistors, memory devices, and MEMs devices, the Semiconductor Industry Association Outstanding Researcher Award (2014), and the Semiconductor Research Corporation Aristotle Award (2016).  She has authored or co-authored over 500 publications and holds over 90 patents. Liu is a Fellow of the IEEE, an elected member of the U.S. National Academy of Engineering, and a Fellow of the U.S. National Academy of Inventors.  She also serves on the Board of Directors of Intel Corporation.

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